Monte Carlo simulation study of hole mobility in Germanium MOS inversion layers

C. Riddet, J. R. Watling, K. H. Chan, A. Asenov, Brice De Jaeger, Jerome Mitard, Marc Meuris

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

3 Citations (Scopus)

Abstract

In this paper transport in the inversion layer of a Ge channel pMOS structure is studied using a full 6-band k·p Monte Carlo simulator. In addition to the usual bulk-scattering mechanisms, which are calibrated and validated against the available experimental data, effects of the gate stack are included via SO phonons and surface roughness scattering. Through careful calibration and consideration of these mechanisms, good qualitative and quantitative agreement is achieved with experimental data.

Original languageEnglish
Title of host publication2010 14th International Workshop on Computational Electronics, IWCE 2010
Pages239-242
Number of pages4
DOIs
Publication statusPublished - 2010
Externally publishedYes
Event2010 14th International Workshop on Computational Electronics, IWCE 2010 - Pisa, Italy
Duration: 26 Oct 201029 Oct 2010

Publication series

Name2010 14th International Workshop on Computational Electronics, IWCE 2010

Conference

Conference2010 14th International Workshop on Computational Electronics, IWCE 2010
Country/TerritoryItaly
CityPisa
Period26/10/1029/10/10

Keywords

  • Full band
  • Germanium
  • High-κ
  • Monte Carlo
  • Surface roughness scattering
  • pMOSFET

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