Abstract
In this paper a drift diffusion simulation study of a 20 nm gate-length implant-free quantum well germanium p-MOSFET is presented, which covers the impact of mobility, velocity saturation and density of interface states on the transistor performance. The parasitic gate capacitance was also studied. The simulations show that the 20 nm gate-length implant-free quantum-well transistor design has good electrostatic integrity and performance potential.
| Original language | English |
|---|---|
| Pages (from-to) | 362-365 |
| Number of pages | 4 |
| Journal | Microelectronic Engineering |
| Volume | 88 |
| Issue number | 4 |
| DOIs | |
| Publication status | Published - Apr 2011 |
| Externally published | Yes |
Keywords
- Germanium
- Hole
- Interface state trap density
- Mobility
- Parasitic gate capacitance
- p-MOSFET
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