Device and Circuit Performance of the Future Hybrid III-V and Ge-Based CMOS Technology

The device and circuit performance of a 20-nm gate length InGaAs and Ge hybrid CMOS based on an implant free quantum well (QW) device architecture is studied using a multiscale approach combining ensemble Monte Carlo simulation, drift-diffusion simulation, compact modeling, and TCAD mixed-mode circuit simulation. We have found that the QW and doped substrate, used in the hybrid CMOS, help to reduce shortchannel effects by enhancing carrier confinement. The QW also reduces the destructive impact of a low density of states in III-V materials. In addition, the calculated access resistance is found to be a much lower than in Si counterparts thanks to a heavily doped overgrowth source/drain contact. We predict an overall low gate capacitance and a large drive current when compared with Si-CMOS that leads to a significant reduction in a circuit propagation time delay (~5.5 ps).